As a recognized technology leader in the field of complex deposition processes, AIXTRON focuses on its core competencies. With the development, manufacture, distribution and maintenance of thin film deposition systems for complex materials via the MOCVD process, AIXTRON addresses the growing future markets for optoelectronics and power electronics.

AIXTRON SE is a leading provider of deposition equipment to the semiconductor industry. The Company was founded in 1983 and is headquartered in Herzogenrath (near Aachen), Germany, with subsidiaries and sales offices in Asia, United States and in Europe. AIXTRON´s technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound or organic semiconductor materials.

Such components are used in a broad range of innovative applications, technologies and industries. These include Laser and LED applications, display technologies, data transmission, SiC and GaN power management and conversion, communication, signaling and lighting as well as a range of other leading-edge technologies.

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AIXTRON SE role in the project are related to MOCVD technology investigations. Aim is to investigate and improve GaN processes and equipment regarding the MOCVD technology. AIXTRON SE supports project partners with wafer samples and homogeneity characterization. AIXTRON SE leads task 5.1.1 regarding test structures for defect and reliability analysis.

Key Contribution

In WP1 AIXTRON SE works on design and growth of test structures for vertical power devices to investigate MOCVD technologies together with IMEC. In WP2 the focus of AIXTRON SE is on 200mm GaN on Si process and equipment improvement for 600V power HEMT. AIXTRON SE investigates MOCVD requirements and improvements towards GaN for RF applications in WP3. Additionally AIXTRON SE propose and use test structures to clarify MOCVD related defects and traps and correlates feedback to MOCVD hardware in WP5.